Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10108085 | Method for localizing defects on substrates | Jörg Frederik Blumrich, Dirk Seidel, Christoph Husemann | 2018-10-23 |
| 10055833 | Method and system for EUV mask blank buried defect analysis | Frederik Blumrich, Anthony Garetto, Thomas Scherübl, Renzo Capelli | 2018-08-21 |