Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10055833 | Method and system for EUV mask blank buried defect analysis | Jan Hendrik Peters, Frederik Blumrich, Anthony Garetto, Thomas Scherübl | 2018-08-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10055833 | Method and system for EUV mask blank buried defect analysis | Jan Hendrik Peters, Frederik Blumrich, Anthony Garetto, Thomas Scherübl | 2018-08-21 |