Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Heiko Feldmann, Erik Matthias Sohmen, Oswald Gromer, Ulrich Mueller, Michael Layh +1 more | 2018-10-30 |
| 10042271 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Oswald Gromer, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2018-08-07 |