Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101667 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Bernd Doerband, Jochen Hetzler | 2018-10-16 |
| 10042271 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Paul Kaufmann, Bernhard Geuppert | 2018-08-07 |
| 9996014 | Optical imaging device with image defect determination | Ulrich Wegmann | 2018-06-12 |