Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146135 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Markus Deguenther, Michael Patra, Johannes Wangler, Manfred Maul, Damian Fiolka +1 more | 2018-12-04 |
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Heiko Feldmann, Erik Matthias Sohmen, Joachim Stuehler, Oswald Gromer, Ulrich Mueller +1 more | 2018-10-30 |
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther | 2018-05-22 |
| 9933704 | Microlithography illumination optical system and microlithography projection exposure apparatus including same | Michael Patra, Markus Deguenther | 2018-04-03 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2018-02-20 |