Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2018-10-02 |
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Michael Patra, Markus Deguenther, Michael Layh | 2018-05-22 |
| 9933706 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Damian Fiolka | 2018-04-03 |