Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088754 | Illumination system for microlithography | Axel Scholz, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2018-10-02 |
| 9983483 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Markus Schwab | 2018-05-29 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Stefanie Hilt, Wolfgang Hoegele | 2018-03-06 |