Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Michael Gerhard, Gerhard-Wilhelm Ziegler +8 more | 2018-10-02 |
| 9977334 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Thomas Korb, Johannes Eisenmenger | 2018-05-22 |
| 9924587 | Negative ion-based neutral beam injector | Yuri I. Belchenko, Alexander V. Burdakov, Gennady I. Dimov, Alexandr A. Ivanov, Valeery V. Kobets +4 more | 2018-03-20 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Thomas Korb, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2018-03-06 |
| 9910360 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Thomas Korb, Johannes Eisenmenger | 2018-03-06 |