Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061203 | Beam distributing optical device and associated unit, system and apparatus | Markus Deguenther, Michael Patra | 2018-08-28 |
| 10042248 | Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit | Markus Degünther | 2018-08-07 |
| 10012907 | Optical system of a microlithographic projection exposure apparatus | Markus Deguenther | 2018-07-03 |
| 9977334 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Johannes Eisenmenger | 2018-05-22 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2018-03-06 |
| 9910360 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Markus Deguenther, Vladimir Davydenko, Johannes Eisenmenger | 2018-03-06 |