Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078267 | Method for predicting at least one illumination parameter for evaluating an illumination setting | Ralf Gehrke, Christoph Hennerkes, Joerg Zimmermann | 2018-09-18 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Markus Deguenther, Vladimir Davydenko, Thomas Korb, Frank Schlesener, Stefanie Hilt | 2018-03-06 |