Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2018-05-22 |