Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996012 | Facet mirror for use in a projection exposure apparatus for microlithography | Martin Endres, Armin Werber, Norbert Muehlberger, Florian Bach | 2018-06-12 |
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Frederik Bijkerk, Muharrem Bayraktar, Oliver Dier | 2018-06-12 |