Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Udo Dinger, Frederik Bijkerk, Oliver Dier | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Udo Dinger, Frederik Bijkerk, Oliver Dier | 2018-06-12 |