Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996012 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Armin Werber, Florian Bach | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996012 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Armin Werber, Florian Bach | 2018-06-12 |