Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139618 | Multi-mirror array | Stefan Tuerk, Oscar Franciscus Jozephus Noordman, Ulrich Bihr | 2018-11-27 |
| 10061202 | Methods and devices for driving micromirrors | Christian Kempter | 2018-08-28 |
| 10018803 | Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement | Markus Holz, Joerg Specht, Johannes Eisenmenger, Stefan Krone | 2018-07-10 |
| 10007195 | Device for determining a tilt angle of at least one mirror of a lithography system, and method | Markus Holz, Joerg Specht | 2018-06-26 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2018-02-20 |