Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018803 | Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement | Jan Horn, Markus Holz, Johannes Eisenmenger, Stefan Krone | 2018-07-10 |
| 10007195 | Device for determining a tilt angle of at least one mirror of a lithography system, and method | Jan Horn, Markus Holz | 2018-06-26 |