Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977228 | Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner | Jens Kugler, Yim-Bun Patrick Kwan | 2018-05-22 |