Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Dirk Schaffer, Andreas Wurmbrand, Markus Kern | 2018-06-12 |
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Jens Kugler, Martin Mahlmann, Bernhard Geuppert +2 more | 2018-02-13 |