Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Dirk Schaffer, Andreas Wurmbrand, Bernhard Gellrich | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Dirk Schaffer, Andreas Wurmbrand, Bernhard Gellrich | 2018-06-12 |