Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095126 | Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same | Marwene Nefzi, Dirk Schaffer | 2018-10-09 |
| 10007186 | Optical arrangement of a microlithographic projection exposure apparatus | Dirk Schaffer | 2018-06-26 |
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Dirk Schaffer, Andreas Wurmbrand, Bernhard Gellrich, Markus Kern | 2018-06-12 |