Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095126 | Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same | Jens Prochnau, Marwene Nefzi | 2018-10-09 |
| 10007186 | Optical arrangement of a microlithographic projection exposure apparatus | Jens Prochnau | 2018-06-26 |
| 9996015 | Mirror module, in particular for a microlithographic projection exposure appararatus | Jens Prochnau, Andreas Wurmbrand, Bernhard Gellrich, Markus Kern | 2018-06-12 |
| 9869937 | Mirror arrangement for a lithography apparatus and method for producing the same | — | 2018-01-16 |