| 10163696 |
Selective cobalt removal for bottom up gapfill |
Xikun Wang, Jianxin Lei, Roey Shaviv |
2018-12-25 |
| 10128086 |
Silicon pretreatment for nitride removal |
Jiayin Huang, Zhijun Chen, Anchuan Wang |
2018-11-13 |
| 10113236 |
Batch curing chamber with gas distribution and individual pumping |
Adib Khan, Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Qiwei Liang |
2018-10-30 |
| 10062579 |
Selective SiN lateral recess |
Zhijun Chen, Jiayin Huang, Anchuan Wang |
2018-08-28 |
| 10062578 |
Methods for etch of metal and metal-oxide films |
Jingchun Zhang, Anchuan Wang |
2018-08-28 |
| 10049891 |
Selective in situ cobalt residue removal |
Xikun Wang |
2018-08-14 |
| 10043684 |
Self-limiting atomic thermal etching systems and methods |
Ranga Rao Arnepalli, Prerna Goradia, Robert Jan Visser, Mikhail Korolik, Jayeeta Biswas +1 more |
2018-08-07 |
| 10043674 |
Germanium etching systems and methods |
Mikhail Korolik, Dimitri Kioussis |
2018-08-07 |
| 10026621 |
SiN spacer profile patterning |
Jungmin Ko, Tom Choi, Kwang Soo Kim, Theodore Wou |
2018-07-17 |
| 10026597 |
Hydrogen plasma based cleaning process for etch hardware |
Chirantha Rodrigo, Jingchun Zhang, Lili Ji, Anchuan Wang |
2018-07-17 |
| 9991134 |
Processing systems and methods for halide scavenging |
Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more |
2018-06-05 |
| 9966240 |
Systems and methods for internal surface conditioning assessment in plasma processing equipment |
Soonam Park, Yufei Zhu, Edwin C. Suarez, Dmitry Lubomirsky, Jiayin Huang |
2018-05-08 |
| 9960045 |
Charge-trap layer separation and word-line isolation for enhanced 3-D NAND structure |
Vinod R. Purayath |
2018-05-01 |
| 9947549 |
Cobalt-containing material removal |
Xikun Wang, Zhenjiang Cui, Soonam Park |
2018-04-17 |
| 9896770 |
Methods of etching films with reduced surface roughness |
Benjamin Schmiege, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more |
2018-02-20 |
| 9887096 |
Differential silicon oxide etch |
Seung Ho Park, Yunyu Wang, Jingchun Zhang, Anchuan Wang |
2018-02-06 |
| 9875907 |
Self-aligned shielding of silicon oxide |
Fei Wang, Mikhail Korolik, Anchuan Wang, Robert Jan Visser |
2018-01-23 |
| 9859128 |
Self-aligned shielding of silicon oxide |
Fei Wang, Mikhail Korolik, Anchuan Wang, Robert Jan Visser |
2018-01-02 |
