Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128086 | Silicon pretreatment for nitride removal | Zhijun Chen, Anchuan Wang, Nitin K. Ingle | 2018-11-13 |
| 10062579 | Selective SiN lateral recess | Zhijun Chen, Anchuan Wang, Nitin K. Ingle | 2018-08-28 |
| 9991134 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2018-06-05 |
| 9966240 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky | 2018-05-08 |