Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991134 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2018-06-05 |
| 9881805 | Silicon selective removal | Ching-Mei Hsu, Hanshen Zhang, Jingchun Zhang | 2018-01-30 |