Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134581 | Methods and apparatus for selective dry etch | Ning Li, Mihaela Balseanu, Li-Qun Xia, Dongqing Yang | 2018-11-20 |
| 10128086 | Silicon pretreatment for nitride removal | Jiayin Huang, Zhijun Chen, Nitin K. Ingle | 2018-11-13 |
| 10062578 | Methods for etch of metal and metal-oxide films | Jingchun Zhang, Nitin K. Ingle | 2018-08-28 |
| 10062579 | Selective SiN lateral recess | Zhijun Chen, Jiayin Huang, Nitin K. Ingle | 2018-08-28 |
| 10026597 | Hydrogen plasma based cleaning process for etch hardware | Chirantha Rodrigo, Jingchun Zhang, Lili Ji, Nitin K. Ingle | 2018-07-17 |
| 9991134 | Processing systems and methods for halide scavenging | Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2018-06-05 |
| 9887096 | Differential silicon oxide etch | Seung Ho Park, Yunyu Wang, Jingchun Zhang, Nitin K. Ingle | 2018-02-06 |
| 9875907 | Self-aligned shielding of silicon oxide | Fei Wang, Mikhail Korolik, Nitin K. Ingle, Robert Jan Visser | 2018-01-23 |
| 9859128 | Self-aligned shielding of silicon oxide | Fei Wang, Mikhail Korolik, Nitin K. Ingle, Robert Jan Visser | 2018-01-02 |