Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134581 | Methods and apparatus for selective dry etch | Ning Li, Mihaela Balseanu, Li-Qun Xia, Anchuan Wang | 2018-11-20 |
| 10008366 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Nicholas Celeste, Dmitry Lubomirsky, Peter M. Hillman, Douglas B. Hayden | 2018-06-26 |