Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147599 | Methods for depositing low K and low wet etch rate dielectric thin films | Ning Li, Mark Saly, David Thompson, Mihaela Balseanu | 2018-12-04 |
| 10134581 | Methods and apparatus for selective dry etch | Ning Li, Mihaela Balseanu, Dongqing Yang, Anchuan Wang | 2018-11-20 |
| 10023958 | Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors | Victor Nguyen, Ning Li, Mihaela Balseanu, Mark Saly, David Thompson | 2018-07-17 |
| 9984868 | PEALD of films comprising silicon nitride | Victor Nguyen, Woong Jae Lee, Mihaela Balseanu, Derek R. Witty | 2018-05-29 |
| 9875888 | High temperature silicon oxide atomic layer deposition technology | Wenbo Yan, Cong Trinh, Ning Li, Victor Nguyen, Mihaela Balseanu +1 more | 2018-01-23 |