Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984868 | PEALD of films comprising silicon nitride | Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Derek R. Witty | 2018-05-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984868 | PEALD of films comprising silicon nitride | Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Derek R. Witty | 2018-05-29 |