Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062578 | Methods for etch of metal and metal-oxide films | Anchuan Wang, Nitin K. Ingle | 2018-08-28 |
| 10026597 | Hydrogen plasma based cleaning process for etch hardware | Chirantha Rodrigo, Lili Ji, Anchuan Wang, Nitin K. Ingle | 2018-07-17 |
| 9887096 | Differential silicon oxide etch | Seung Ho Park, Yunyu Wang, Anchuan Wang, Nitin K. Ingle | 2018-02-06 |
| 9881805 | Silicon selective removal | Zihui Li, Ching-Mei Hsu, Hanshen Zhang | 2018-01-30 |