Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026597 | Hydrogen plasma based cleaning process for etch hardware | Jingchun Zhang, Lili Ji, Anchuan Wang, Nitin K. Ingle | 2018-07-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026597 | Hydrogen plasma based cleaning process for etch hardware | Jingchun Zhang, Lili Ji, Anchuan Wang, Nitin K. Ingle | 2018-07-17 |