Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026597 | Hydrogen plasma based cleaning process for etch hardware | Chirantha Rodrigo, Jingchun Zhang, Anchuan Wang, Nitin K. Ingle | 2018-07-17 |
| 9975758 | Wafer processing equipment having exposable sensing layers | Leonard Tedeschi, Olivier Joubert, Dmitry Lubomirsky, Philip Allan Kraus, Daniel T. McCormick | 2018-05-22 |