Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083883 | Wafer processing equipment having capacitive micro sensors | Kartik Ramaswamy, Daniel T. McCormick, Robert Meagley | 2018-09-25 |
| 10067070 | Particle monitoring device | Kartik Ramaswamy | 2018-09-04 |
| 9975758 | Wafer processing equipment having exposable sensing layers | Lili Ji, Olivier Joubert, Dmitry Lubomirsky, Philip Allan Kraus, Daniel T. McCormick | 2018-05-22 |