Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960049 | Two-step fluorine radical etch of hafnium oxide | Jie Liu, Zhenjiang Cui | 2018-05-01 |
| 9881805 | Silicon selective removal | Zihui Li, Ching-Mei Hsu, Jingchun Zhang | 2018-01-30 |