Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960049 | Two-step fluorine radical etch of hafnium oxide | Hanshen Zhang, Jie Liu | 2018-05-01 |
| 9947549 | Cobalt-containing material removal | Xikun Wang, Soonam Park, Nitin K. Ingle | 2018-04-17 |