Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163696 | Selective cobalt removal for bottom up gapfill | Jianxin Lei, Nitin K. Ingle, Roey Shaviv | 2018-12-25 |
| 10049891 | Selective in situ cobalt residue removal | Nitin K. Ingle | 2018-08-14 |
| 9947549 | Cobalt-containing material removal | Zhenjiang Cui, Soonam Park, Nitin K. Ingle | 2018-04-17 |
| 9896770 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Jie Liu +1 more | 2018-02-20 |