Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163696 | Selective cobalt removal for bottom up gapfill | Xikun Wang, Nitin K. Ingle, Roey Shaviv | 2018-12-25 |
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Thanh X. Nguyen, Zhiyong Wang, Xianmin Tang | 2018-08-07 |