Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Thanh X. Nguyen, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2018-08-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Thanh X. Nguyen, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2018-08-07 |