Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083834 | Methods of forming self-aligned vias | David Thompson, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan | 2018-09-25 |
| 10000853 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist | 2018-06-19 |
| 9896770 | Methods of etching films with reduced surface roughness | Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more | 2018-02-20 |
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei, Yung-Hsin Lee +7 more | 2018-01-30 |