Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113229 | Techniques for controlling ion/neutral ratio of a plasma source | John Hautala, Shurong Liang, Joseph C. Olson | 2018-10-30 |
| 10000853 | System and method for controllable non-volatile metal removal | Benjamin Schmiege, Jeffrey W. Anthis, Glen Gilchrist | 2018-06-19 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2018-06-19 |
| 9997351 | Apparatus and techniques for filling a cavity using angled ion beam | John Hautala, Shurong Liang | 2018-06-12 |