Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113229 | Techniques for controlling ion/neutral ratio of a plasma source | Tsung-Liang Chen, John Hautala, Shurong Liang | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113229 | Techniques for controlling ion/neutral ratio of a plasma source | Tsung-Liang Chen, John Hautala, Shurong Liang | 2018-10-30 |