Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141161 | Angle control for radicals and reactive neutral ion beams | Glen Gilchrist | 2018-11-27 |
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2018-11-13 |
| 10113229 | Techniques for controlling ion/neutral ratio of a plasma source | Tsung-Liang Chen, John Hautala, Joseph C. Olson | 2018-10-30 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |
| 9997351 | Apparatus and techniques for filling a cavity using angled ion beam | Tsung-Liang Chen, John Hautala | 2018-06-12 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Alexander C. Kontos, Jeffrey E. Krampert +1 more | 2018-01-09 |