Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2018-06-19 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Shurong Liang, Jeffrey E. Krampert +1 more | 2018-01-09 |