Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +1 more | 2018-11-13 |
| 10049861 | Inductively coupled RF plasma source with magnetic confinement and Faraday shielding | Victor M. Benveniste, Svetlana B. Radovanov | 2018-08-14 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |