Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141161 | Angle control for radicals and reactive neutral ion beams | Shurong Liang | 2018-11-27 |
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Kevin M. Daniels | 2018-08-28 |
| 10000853 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Jeffrey W. Anthis | 2018-06-19 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |