Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Richard J. Hertel, Glen Gilchrist | 2018-08-28 |
| 9863032 | Techniques for processing a substrate | Russell J. Low, Nicholas P. T. Bateman, Benjamin B. Riordon | 2018-01-09 |