Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell +1 more | 2018-11-13 |
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Kevin M. Daniels, Glen Gilchrist | 2018-08-28 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2018-06-19 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Alexander C. Kontos, Shurong Liang, Jeffrey E. Krampert +1 more | 2018-01-09 |