Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Christopher Campbell, Richard J. Hertel +1 more | 2018-11-13 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Christopher Campbell, Richard J. Hertel +3 more | 2018-06-19 |