Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121671 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Knapp, David Thompson, Mei Chang | 2018-11-06 |
| 10115593 | Chemical modification of hardmask films for enhanced etching and selective removal | David Knapp, Simon Huang, Philip Alan Kraus, David Thompson | 2018-10-30 |
| 10096514 | Seamless trench fill using deposition/etch techniques | David Thompson | 2018-10-09 |
| 10083834 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Abhijit Basu Mallick, Susmit Singha Roy, Ziqing Duan | 2018-09-25 |
| 10036089 | Methods of depositing a metal alloy film | David Thompson | 2018-07-31 |
| 10000853 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Glen Gilchrist | 2018-06-19 |
| 9982345 | Deposition of metal films using beta-hydrogen free precursors | David Thompson, David Knapp | 2018-05-29 |
| 9922872 | Tungsten films by organometallic or silane pre-treatment of substrate | David Knapp, Xinyu Fu, Srinivas Gandikota | 2018-03-20 |
| 9896770 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Xikun Wang, Jie Liu +1 more | 2018-02-20 |
| 9870915 | Chemical modification of hardmask films for enhanced etching and selective removal | David Knapp, Simon Huang, Philip Alan Kraus, David Thompson | 2018-01-16 |