Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121671 | Methods of depositing metal films using metal oxyhalide precursors | Xinyu Fu, David Thompson, Jeffrey W. Anthis, Mei Chang | 2018-11-06 |
| 10115593 | Chemical modification of hardmask films for enhanced etching and selective removal | Simon Huang, Jeffrey W. Anthis, Philip Alan Kraus, David Thompson | 2018-10-30 |
| 9982345 | Deposition of metal films using beta-hydrogen free precursors | David Thompson, Jeffrey W. Anthis | 2018-05-29 |
| 9922872 | Tungsten films by organometallic or silane pre-treatment of substrate | Jeffrey W. Anthis, Xinyu Fu, Srinivas Gandikota | 2018-03-20 |
| 9916975 | Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use | Feng Q. Liu, Ben-Li Sheu, David Thompson | 2018-03-13 |
| 9908900 | Methods for forming protected organoboronic acids | Martin D. Burke, Graham R. Dick, Eric P. Gillis, Jenna A. Klubnick | 2018-03-06 |
| 9870915 | Chemical modification of hardmask films for enhanced etching and selective removal | Simon Huang, Jeffrey W. Anthis, Philip Alan Kraus, David Thompson | 2018-01-16 |