Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008412 | Doping control of metal nitride films | Annamalai Lakshmanan, Guodan Wei, Nicole Lundy, Paul F. Ma | 2018-06-26 |
| 9953926 | Methods of depositing cobalt manganese films | Sang Ho Yu, Paul F. Ma, Jiang Lu | 2018-04-24 |
| 9916975 | Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use | Feng Q. Liu, David Knapp, David Thompson | 2018-03-13 |